MIKROELEKTRONIKADA KREMNIYLI TAGLIKKA ISHLOV BERISH

Authors

  • Daliyev Xojakbar Sultanovich
  • G’ofurova Dilnoza Nosirjon qizi

Keywords:

Kalit so’zlar: yarim o’tkazgich asboblar, integral sxema, local diffuziya, kremniyli taglik, kremniy silitkasi, legirlash, jilvirlash, oksidlash, fotolitografiya p-n o’tishlar.

Abstract

Annotatsiya: Ushbu tadqiqot ishida mikroelektronikada kremniyli taglikka ishlov berish o’rganilgan, xususan mehanik ishlov berish, jilvirlash, oksidlash va boshqa ishlov berish yo’llari orqali.

Published

2022-11-15

How to Cite

Daliyev Xojakbar Sultanovich, & G’ofurova Dilnoza Nosirjon qizi. (2022). MIKROELEKTRONIKADA KREMNIYLI TAGLIKKA ISHLOV BERISH . Journal of New Century Innovations, 17(1), 42–45. Retrieved from https://newjournal.org/new/article/view/858